3D heterostructures and systems for novel MEMS/NEMS

标题
3D heterostructures and systems for novel MEMS/NEMS
作者
关键词
-
出版物
SCIENCE AND TECHNOLOGY OF ADVANCED MATERIALS
Volume 10, Issue 3, Pages 034502
出版商
Informa UK Limited
发表日期
2009-07-15
DOI
10.1088/1468-6996/10/3/034502

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