期刊
SCIENCE
卷 340, 期 6134, 页码 827-831出版社
AMER ASSOC ADVANCEMENT SCIENCE
DOI: 10.1126/science.1232968
关键词
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资金
- COMPHOSOL2 (Fond Unique Interministeriel dans le cadre du 9eme AAP)
- IMPC
- College de France Fondation
- Beatriu de Pinos
- Foundation Pierre-Gilles de Gennes
- Marie Curie Reintegration [PCIG09-GA-2011-294168]
- Spanish Government [MAT2012-35324, CONSOLIDER-Nanoselect-CSD2007-00041, RyC-2009-04335]
- Spanish Government (JAE-CSIC)
- Oak Ridge National Laboratory
- Scientific User Facility Division, Office of Basic Energy Sciences, U.S. Department of Energy
Piezoelectric nanostructured quartz films of high resonance frequencies are needed for microelectronic devices; however, synthesis methods have been frustrated by the inhomogeneous crystal growth, crystal twinning, and loss of nanofeatures upon crystallization. We report the epitaxial growth of nanostructured polycrystalline quartz films on silicon [Si(100)] substrates via the solution deposition and gelation of amorphous silica thin films, followed by thermal treatment. Key to the process is the combined use of either a strontium (Sr2+) or barium (Ba2+) catalyst with an amphiphilic molecular template. The silica nanostructure constructed by cooperative self-assembly permits homogeneous distribution of the cations, which are responsible for the crystallization of quartz. The low mismatch between the silicon and a-quartz cell parameters selects this particular polymorph, inducing epitaxial growth.
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