期刊
RUSSIAN JOURNAL OF NON-FERROUS METALS
卷 55, 期 6, 页码 645-651出版社
PLEIADES PUBLISHING INC
DOI: 10.3103/S106782121406011X
关键词
Mo-Si-B and Mo-Si-B-N coatings; oxidation resistance; magnetron sputtering; SHS targets; TEM; SEM-EDS; GDOES
资金
- Federal Target Program Investigations and Implementations over Priority Directions of the Development of the Scientific-and-Technology Complex of Russia [14.513.11.051]
The influence of the silicon concentration on the oxidation resistance of Mo-Si-B-N coatings prepared by magnetron sputtering is investigated. The Si content in them was controlled by the composite-target composition, as well as by various areas of silicon segments placed into the target-erosion zone. The composition and structure of coatings after deposition and annealing in air at temperatures of 500-1300A degrees C are investigated using transmission and scanning electron microscopy, energy-dispersive analysis, and glow-discharge optical emission spectroscopy. It is established that oxidation resistance increases as the Si concentration in coatings increases, which is caused by the formation of a silicon oxide-based dense layer; this layer prevents oxygen propagation into the coating depth upon heating. The maximal oxidation resistance at a level of 1300A degrees C is attained in Mo-Si-B-N coatings containing 40 at % Si.
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