Model of structural zones of the TiN and TiAlN coatings formed by the arc evaporation of metal in an active gas medium

出版年份 2014 全文链接

标题

作者

关键词

model of structural zones, polycrystalline films, structural evolution, temperature and process conditions, arc evaporation

出版物

Volume 54, Issue 6, Pages 541-547

出版商

Allerton Press

发表日期

2014-01-04

DOI

10.3103/s1067821213060096

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