期刊
REVIEW OF SCIENTIFIC INSTRUMENTS
卷 84, 期 3, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.4774387
关键词
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资金
- US Department of Energy [DE-AC02-98CH10886]
- U.S. Department of Energy, Office of Science [DE-AC02-06CH11357]
Synchrotron based x-ray microscopy established itself as a prominent tool for noninvasive investigations in many areas of science and technology. Many facilities around the world routinely achieve sub-micrometer resolution with a few instruments capable of imaging with the spatial resolution better than 100 nm. With an ongoing effort to push the 2D/3D resolution down to 10 nm in the hard x-ray regime both fabrication of the nano-focusing optics and stability of a microscope become extremely challenging. In this work we present our approach to overcome technical challenges on the path towards high spatial resolution hard x-ray microscopy and demonstrate the performance of a scanning fluorescence microscope equipped with the multilayer Laue lenses focusing optics. (C) 2013 American Institute of Physics. [http://dx.doi.org/10.1063/1.4774387]
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