期刊
REVIEW OF SCIENTIFIC INSTRUMENTS
卷 83, 期 1, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.3676165
关键词
-
资金
- SENTAN, Japan Science and Technology Corporation (JST)
A circular multilayer zone plate (MZP) was fabricated and its focusing performance was evaluated using 20-keV x-rays. MoSi2 and Si layers were alternately deposited by DC magnetron sputtering on a wire core; all the interfaces satisfied the Fresnel zone condition. The measured line spread function was converted to a point spread function by tomographic reconstruction. The results suggest that the MZP has the potential to realize the diffraction-limited resolving power, which is calculated to be 35 nm using the diffraction integral. Furthermore, scanning transmission microscopy using the MZP could resolve a 50-nm line-and-space pattern. (C) 2012 American Institute of Physics. [doi:10.1063/1.3676165]
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据