A platform to parallelize planar surfaces and control their spatial separation with nanometer resolution

标题
A platform to parallelize planar surfaces and control their spatial separation with nanometer resolution
作者
关键词
-
出版物
REVIEW OF SCIENTIFIC INSTRUMENTS
Volume 83, Issue 10, Pages 105101
出版商
AIP Publishing
发表日期
2012-10-02
DOI
10.1063/1.4754643

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