High energy x-ray diffraction/x-ray fluorescence spectroscopy for high-throughput analysis of composition spread thin films

标题
High energy x-ray diffraction/x-ray fluorescence spectroscopy for high-throughput analysis of composition spread thin films
作者
关键词
-
出版物
REVIEW OF SCIENTIFIC INSTRUMENTS
Volume 80, Issue 12, Pages 123905
出版商
AIP Publishing
发表日期
2009-12-29
DOI
10.1063/1.3274179

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