Precise and fast secondary ion mass spectrometry depth profiling of polymer materials with large Ar cluster ion beams

标题
Precise and fast secondary ion mass spectrometry depth profiling of polymer materials with large Ar cluster ion beams
作者
关键词
-
出版物
RAPID COMMUNICATIONS IN MASS SPECTROMETRY
Volume 23, Issue 11, Pages 1601-1606
出版商
Wiley
发表日期
2009-04-28
DOI
10.1002/rcm.4046

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