Extreme ultraviolet (EUV) degradation of poly(olefin sulfone)s: Towards applications as EUV photoresists

标题
Extreme ultraviolet (EUV) degradation of poly(olefin sulfone)s: Towards applications as EUV photoresists
作者
关键词
-
出版物
RADIATION PHYSICS AND CHEMISTRY
Volume 80, Issue 2, Pages 236-241
出版商
Elsevier BV
发表日期
2010-08-04
DOI
10.1016/j.radphyschem.2010.07.038

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