Thermal annealing using ultra-short laser pulses to improve the electrical properties of Al:ZnO thin films

标题
Thermal annealing using ultra-short laser pulses to improve the electrical properties of Al:ZnO thin films
作者
关键词
Ultrafast laser, Annealing, Al:ZnO, Electrical properties, Laser-induced defects
出版物
ACTA MATERIALIA
Volume 98, Issue -, Pages 327-335
出版商
Elsevier BV
发表日期
2015-08-08
DOI
10.1016/j.actamat.2015.07.047

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