4.0 Article Proceedings Paper

Towards sub-100-nm X-ray microscopy for tomographic applications

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POWDER DIFFRACTION
卷 25, 期 2, 页码 157-160

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CAMBRIDGE UNIV PRESS
DOI: 10.1154/1.3416936

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nanotomography; nanofocal spot size; X-ray microscopy

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We have demonstrated that structures down to 150 nm can be visualized in X-ray projection images using nanofocus X-ray sources. Due to their unlimited depth of focus, they do not possess a limit on the specimen size. This is essential for three-dimensional tomographic imaging of samples with a diameter larger than a few microns. Further simulation studies have shown that optimization of the detector response curve and switching from a reflective X-ray target to a transmission target should allow us to reach sub-100-nm resolutions. (C) 2010 International Centre for Diffraction Data. [DOI: 10.1154/1.3416936]

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