Modeling the extraction of sputtered metal from high power impulse hollow cathode discharges

标题
Modeling the extraction of sputtered metal from high power impulse hollow cathode discharges
作者
关键词
-
出版物
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 22, Issue 3, Pages 035006
出版商
IOP Publishing
发表日期
2013-05-07
DOI
10.1088/0963-0252/22/3/035006

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