Electron density measurements on an inductively coupled plasma with a one-port microwave interferometer

出版年份 2012 全文链接

标题

作者

关键词

出版物

Volume 21, Issue 5, Pages 055032

出版商

IOP Publishing

发表日期

2012-10-04

DOI

10.1088/0963-0252/21/5/055032

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