Experimental observation of the skin effect on plasma uniformity in inductively coupled plasmas with a radio frequency bias

标题
Experimental observation of the skin effect on plasma uniformity in inductively coupled plasmas with a radio frequency bias
作者
关键词
-
出版物
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 21, Issue 3, Pages 035003
出版商
IOP Publishing
发表日期
2012-05-24
DOI
10.1088/0963-0252/21/3/035003

向作者/读者发起求助以获取更多资源

Add your recorded webinar

Do you already have a recorded webinar? Grow your audience and get more views by easily listing your recording on Peeref.

Upload Now

Become a Peeref-certified reviewer

The Peeref Institute provides free reviewer training that teaches the core competencies of the academic peer review process.

Get Started