Modeling and experimental study of molecular nitrogen dissociation in an Ar–N2ICP discharge

标题
Modeling and experimental study of molecular nitrogen dissociation in an Ar–N2ICP discharge
作者
关键词
-
出版物
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 20, Issue 4, Pages 045015
出版商
IOP Publishing
发表日期
2011-06-28
DOI
10.1088/0963-0252/20/4/045015

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