Ion energy distributions for the identification of active species and processes in low pressure hollow cathode discharges

标题
Ion energy distributions for the identification of active species and processes in low pressure hollow cathode discharges
作者
关键词
-
出版物
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 18, Issue 3, Pages 034007
出版商
IOP Publishing
发表日期
2009-07-16
DOI
10.1088/0963-0252/18/3/034007

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