Characterization of a side-type ferrite inductively coupled plasma source for large-scale processing

标题
Characterization of a side-type ferrite inductively coupled plasma source for large-scale processing
作者
关键词
-
出版物
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 17, Issue 1, Pages 015014
出版商
IOP Publishing
发表日期
2008-01-11
DOI
10.1088/0963-0252/17/1/015014

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