Experimental Study on Electrical Breakdown for Devices with Micrometer Gaps

Increased surface flashover voltage in microfabricated devices

(2013) R. C. Sterling et al.   APPLIED PHYSICS LETTERS

Pre-breakdown evaluation of gas discharge mechanisms in microgaps

(2013) Abbas Semnani et al.   APPLIED PHYSICS LETTERS

Direct measurements and numerical simulations of gas charging in microelectromechanical system capacitive switches

(2012) A. Venkattraman et al.   APPLIED PHYSICS LETTERS

A study of field emission process in electrostatically actuated MEMS switches

(2012) L. Michalas et al.   MICROELECTRONICS RELIABILITY

An analytical formulation for the modified Paschen’s curve

(2010) Rakshit Tirumala et al.   APPLIED PHYSICS LETTERS

Review of Device and Reliability Physics of Dielectrics in Electrostatically Driven MEMS Devices

(2009) W.A. de Groot et al.   IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY

Electrical breakdown at low pressure for planar microelectromechanical systems with 10-to500-μm gaps

(2009) Patrick Carazzetti   Journal of Micro-Nanolithography MEMS and MOEMS

Direct simulation of ionization and ion transport for planar microscale ion generation devices

(2009) D B Go et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Planar microscale ionization devices in atmospheric air with diamond-based electrodes

(2009) D B Go et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Electrical discharge across micrometer-scale gaps for planar MEMS structures in air at atmospheric pressure

(2008) Fabian W Strong et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Theoretical study of the electron field emission phenomena in the generation of a micrometer scale discharge

(2008) Marija Radmilović-Radjenović et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY