Nanomechanical and Electrochemical Properties of Diamond-Like Carbon (DLC) Films Deposited by Plasma Enhanced Chemical Vapor Deposition (PECVD) Technique

标题
Nanomechanical and Electrochemical Properties of Diamond-Like Carbon (DLC) Films Deposited by Plasma Enhanced Chemical Vapor Deposition (PECVD) Technique
作者
关键词
-
出版物
PLASMA SCIENCE & TECHNOLOGY
Volume 12, Issue 4, Pages 461-465
出版商
IOP Publishing
发表日期
2010-09-09
DOI
10.1088/1009-0630/12/4/15

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