Plasma Etching of Poly(dimethylsiloxane): Roughness Formation, Mechanism, Control, and Application in the Fabrication of Microfluidic Structures
出版年份 2012 全文链接
标题
Plasma Etching of Poly(dimethylsiloxane): Roughness Formation, Mechanism, Control, and Application in the Fabrication of Microfluidic Structures
作者
关键词
-
出版物
Plasma Processes and Polymers
Volume 10, Issue 1, Pages 29-40
出版商
Wiley
发表日期
2012-09-30
DOI
10.1002/ppap.201200008
参考文献
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