Fabrication and Operation of a Microcavity Plasma Array Device for Microscale Surface Modification

标题
Fabrication and Operation of a Microcavity Plasma Array Device for Microscale Surface Modification
作者
关键词
-
出版物
Plasma Processes and Polymers
Volume 9, Issue 7, Pages 638-646
出版商
Wiley
发表日期
2012-03-06
DOI
10.1002/ppap.201100166

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