High Rate Etching of Polymers by Means of an Atmospheric Pressure Plasma Jet

标题
High Rate Etching of Polymers by Means of an Atmospheric Pressure Plasma Jet
作者
关键词
-
出版物
Plasma Processes and Polymers
Volume 8, Issue 1, Pages 51-58
出版商
Wiley
发表日期
2010-12-15
DOI
10.1002/ppap.201000093

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