4.5 Article

Plasma Polymerization of HMDSO with an Atmospheric Pressure Plasma Jet for Corrosion Protection of Aluminum and Low-Adhesion Surfaces

期刊

PLASMA PROCESSES AND POLYMERS
卷 6, 期 10, 页码 642-648

出版社

WILEY-V C H VERLAG GMBH
DOI: 10.1002/ppap.200900032

关键词

afterglow plasma processes, coatings; deposition; plasma-enhanced chemical vapor deposition (PE-CVD); plasma jet

资金

  1. Arbeitsgemeznschaft industrieller Forschungsvereinigungen [14817N]

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Thin functional films were deposited on aluminum with an atmospheric pressure plasma jet using hexamethyldisiloxane (HMDSO) as precursor. A high dynamic deposition rate on the order of 450 nm . m . min(-1) was achieved. Composition and structure of the thin films show a strong dependence on the downstream location of the precursor injection. A 4 mm downstream shift of the precursor injection increases the carbon content in the thin film by a factor of 2.5, as indicated by XPS analysis and alters the degree of cross-linking according to the FTIR spectra. The coating with the low carbon content (17 at.-%) provides corrosion resistance for aluminum 2024 unclad exposed for 96 h to a neutral salt spray test. The coating with the high carbon content reduces the adhesion of an epoxy resin to the surface and may be used as a release coating.

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