Adhesion Improvement of Polyimide/Metal Interface by He/O2/NF3Atmospheric Pressure Plasma

标题
Adhesion Improvement of Polyimide/Metal Interface by He/O2/NF3Atmospheric Pressure Plasma
作者
关键词
-
出版物
Plasma Processes and Polymers
Volume 6, Issue S1, Pages S525-S529
出版商
Wiley
发表日期
2009-08-04
DOI
10.1002/ppap.200931111

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