Allylamine plasma polymer coatings of interior surfaces in small trench structures

The modification of interior surfaces in small trench structures was studied for plasma polymerization processes. Pulsed AAm microwave plasmas were applied to deposit thin films at varied applied microwave powers. Specially designed test specimens served as substrates to investigate trenches with AR from 2 to 10. Thin films coated on external and interior surfaces were analyzed with FT-IR spectroscopy and XPS measurements. Dense films with similar morphology are observed in all locations. Chemical composition does neither depend on AR nor on depth. In conclusion, this type of AAm plasma polymer deposition is useful for conformal coating of deep trenches with high AR.