Effect of collision parameters in electronegative plasma sheath with two species of positive ions

标题
Effect of collision parameters in electronegative plasma sheath with two species of positive ions
作者
关键词
-
出版物
PHYSICS OF PLASMAS
Volume 20, Issue 9, Pages 094501
出版商
AIP Publishing
发表日期
2013-09-07
DOI
10.1063/1.4820803

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