Particle-in-cell simulation of an electronegative plasma under direct current bias studied in a large range of electronegativity

标题
Particle-in-cell simulation of an electronegative plasma under direct current bias studied in a large range of electronegativity
作者
关键词
-
出版物
PHYSICS OF PLASMAS
Volume 20, Issue 4, Pages 043501
出版商
AIP Publishing
发表日期
2013-04-29
DOI
10.1063/1.4798501

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