Modeling positive ion current to a planar probe in low-pressure electronegative discharges

标题
Modeling positive ion current to a planar probe in low-pressure electronegative discharges
作者
关键词
-
出版物
PHYSICS OF PLASMAS
Volume 16, Issue 6, Pages 063503
出版商
AIP Publishing
发表日期
2009-06-08
DOI
10.1063/1.3148832

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