Simulation study of the sheath region of a processing plasma with two-temperature electrons and charged nanoparticles

出版年份 2012 全文链接

标题

Simulation study of the sheath region of a processing plasma with two-temperature electrons and charged nanoparticles

作者

关键词

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出版物

PHYSICS LETTERS A

Volume 376, Issue 33, Pages 2244-2251

出版商

Elsevier BV

发表日期

2012-05-17

DOI

10.1016/j.physleta.2012.05.032

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