4.6 Article

Vacancy defect and defect cluster energetics in ion-implanted ZnO

期刊

PHYSICAL REVIEW B
卷 81, 期 8, 页码 -

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AMER PHYSICAL SOC
DOI: 10.1103/PhysRevB.81.081201

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资金

  1. National Science Foundation [DMR-0513968]
  2. Norwegian Research Council
  3. Academy of Finland
  4. Direct For Mathematical & Physical Scien
  5. Division Of Materials Research [0803276] Funding Source: National Science Foundation

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We have used depth-resolved cathodoluminescence, positron annihilation, and surface photovoltage spectroscopies to determine the energy levels of Zn vacancies and vacancy clusters in bulk ZnO crystals. Doppler broadening-measured transformation of Zn vacancies to vacancy clusters with annealing shifts defect energies significantly lower in the ZnO band gap. Zn and corresponding O vacancy-related depth distributions provide a consistent explanation of depth-dependent resistivity and carrier-concentration changes induced by ion implantation.

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