4.6 Article

Strong asymmetric effect of lattice mismatch on epilayer structure in thin-film deposition

期刊

PHYSICAL REVIEW B
卷 79, 期 15, 页码 -

出版社

AMER PHYSICAL SOC
DOI: 10.1103/PhysRevB.79.155414

关键词

adsorbed layers; epitaxial layers; molecular dynamics method

资金

  1. National Science Council, the Republic of China [NSC 95-2112-M-007-025-MY2]
  2. National Center for High-performance Computing

向作者/读者索取更多资源

We investigate the heteroepitaxial growth of thin film deposited on a (001) substrate via molecular-dynamics simulations, using six fcc transition metals as our modeling systems. By studying the radial distribution function in the film layers, we demonstrate the importance of the sign of lattice mismatch on the layer structure. For positive lattice mismatches, the film favors pseudomorphic growth, whereas for negative mismatches, a sharp transition happens within the first few monolayers of adatoms and the film layers are transformed into the close-packed (111) structure. We propose a way to quantify the compositional percentage of different planar structures in an epilayer and demonstrate the strong asymmetric effect between the tensile and compressive cases of deposition. How temperature affects the asymmetry is also discussed.

作者

我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。

评论

主要评分

4.6
评分不足

次要评分

新颖性
-
重要性
-
科学严谨性
-
评价这篇论文

推荐

Article Engineering, Electrical & Electronic

Improved Current Drivability for Sub-20-nm N-FinFETs by Ge Pre-Amorphization in Contact With Reverse Retrograde Profile

Chuan-Pu Chou, Chin-Yu Chen, Kuen-Yi Chen, Shih-Chieh Teng, Jia-Hong Huang, Yung-Hsien Wu

IEEE ELECTRON DEVICE LETTERS (2017)

Article Materials Science, Coatings & Films

Effect of Ti interlayer on mechanical properties of TiZrN coatings on D2 steel

Yu-Wei Lin, Jia-Hong Huang, Wei-Jen Cheng, Ge-Ping Yu

SURFACE & COATINGS TECHNOLOGY (2018)

Article Materials Science, Coatings & Films

Oxidation behavior and corrosion resistance of vacuum annealed ZrN-coated stainless steel

Jia-Hong Huang, Kun-Lin Kuo, Ge-Ping Yu

SURFACE & COATINGS TECHNOLOGY (2019)

Article Materials Science, Coatings & Films

Evaluation of the fracture toughness of Ti1-x ZrxN hard coatings: Effect of compositions

Jia-Hong Huang, You-Fu Chen, Ge-Ping Yu

SURFACE & COATINGS TECHNOLOGY (2019)

Article Materials Science, Multidisciplinary

Optimization of deposition processing of VN thin films using design of experiment and single-variable (nitrogen flow rate) methods

Chung-Kai Wu, Jia-Hong Huang, Ge-Ping Yu

MATERIALS CHEMISTRY AND PHYSICS (2019)

Article Materials Science, Multidisciplinary

Texture evolution of vanadium nitride thin films

Jia-Hong Huang, Cheng-Han Lin, Ge-Ping Yu

THIN SOLID FILMS (2019)

Article Materials Science, Coatings & Films

Effect of Ti interlayer thickness on mechanical properties and wear resistance of TiZrN coatings on AISI D2 steel

Yu-Wei Lin, Po-Chun Chih, Jia-Hong Huang

SURFACE & COATINGS TECHNOLOGY (2020)

Article Materials Science, Multidisciplinary

Evaluation of incipient oxidation behavior of ZrO2-Coated Zircaloy-4 by thermogravimetric analysis

I-Sheng Ting, Jia-Hong Huang

Summary: This study investigated the incipient oxidation behavior of ZrO2-coated Zircaloy-4 and evaluated the feasibility of producing a ZrO2 protective layer by vacuum annealing of ZrN coating. Results showed that ZrO2 coatings displayed good adhesion on Zircaloy-4 substrate and offered oxidation resistance, with differences observed at temperatures above 800 degrees C. The uniform distribution of oxide phases in the specimens varied, and producing a ZrO2 coating on Zircaloy-4 through vacuum annealing of ZrN-coated Zircaloy-4 was found to be infeasible.

MATERIALS CHEMISTRY AND PHYSICS (2021)

Article Materials Science, Multidisciplinary

Evaluation of fracture toughness of VN hard coatings: Effect of preferred orientation

Jia-Hong Huang, Liang-Ju Wei, I-Sheng Ting

Summary: The study evaluated the fracture toughness of VN hard coatings and its dependence on preferred orientation. Coatings with (200) texture showed higher fracture toughness, consistent with higher residual stress. The crack path in VN coatings, regardless of texture, consisted of horizontal and zigzag regions.

MATERIALS CHEMISTRY AND PHYSICS (2022)

Article Materials Science, Coatings & Films

Evaluation of stress and energy relief efficiency of ZrN/Ti and ZrN/Zr

Jia-Hong Huang, I-Sheng Ting, Ting-Wei Zheng

Summary: The purpose of this study was to investigate the stress relief and energy relief efficiency of metal interlayers in bilayer ZrN/Zr and ZrN/Ti thin films. Experimental results showed that Ti interlayer provided more significant stress relief compared to Zr interlayer. Additionally, the thickness of the interlayer affected Delta sigma% and the energy relief efficiency xi tot, which was also influenced by the stress level in the ZrN coating.

SURFACE & COATINGS TECHNOLOGY (2022)

Article Materials Science, Multidisciplinary

Effect of coating architecture on stress and energy relief efficiency of TiZrN coating on Si substrate

Matthew Wei-Jun Liu, Jia-Hong Huang

Summary: This study investigates the stress relief achieved by different types of coating architectures and evaluates the energy relief efficiency using an energy-balance physical model. The results show that introducing a TiN/Ti interlayer can significantly improve stress relief in the TiZrN coating. A tri-layer specimen with a 300-nm TiN layer exhibits the largest stress relief among all specimens. The energy-balance model reveals that the TiN transitional layer acts as a channel to transfer stored elastic energy to the Ti interlayer, resulting in a larger fraction of stress relief in the TiZrN coating.

THIN SOLID FILMS (2022)

Article Materials Science, Coatings & Films

Effect of nitrogen flow rate on the mechanical properties of (V,Mo)N thin films

Yiqun Feng, Tsai-Fu Chung, Jia-Hong Huang

Summary: The objective of this research was to investigate the influence of nitrogen flow rate on the structure and mechanical properties of (V,Mo)N thin films. Different nitrogen flow rates were used to deposit the thin films on Si (100) substrate. The results revealed that the N/metal ratio and microstructure of the thin films varied with the nitrogen flow rate. The hardness and fracture toughness of the films were affected by the presence of Mo metal phase and the N/metal content.

SURFACE & COATINGS TECHNOLOGY (2023)

Article Materials Science, Coatings & Films

Evaluation of stress and elastic energy relief efficiency in a hard coating with a metal interlayer-Using TiN/Ti as a model system

Jia-Hong Huang, I. -Sheng Ting, Peng-Wen Lin

Summary: This study measured the stress relief extent of a hard coating by a metal interlayer in a bilayer system. An energy-balance model was used to evaluate the energy relief efficiency (xi(tot)) by the interlayer. The results showed that xi(tot) increased with increasing stress in the TiN coating and that the energy relief was mostly contributed from the TiN coating.

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A (2023)

Article Engineering, Mechanical

Deposition processing and surface metrology of MoNx thin films by design of experiment and single variable (nitrogen flow rate) methods

Fong-Zhi Chen, I-Sheng Ting, Wei-Zen Kang, Yu-Wei Lin, Jia-Hong Huang

Summary: In this study, the deposition process of MoNx thin films using unbalanced magnetron sputtering (UBMS) was optimized through Taguchi design of experiment (DOE). Single-variable experiments were conducted to investigate the effect of the sensitive parameter derived from the Taguchi experiments on the phase evolution, structure, and properties of the MoNx thin films. The results showed that the retained Mo metal phase played an important role in hardness, electrical resistivity, and residual stress.

SURFACE TOPOGRAPHY-METROLOGY AND PROPERTIES (2023)

Article Materials Science, Coatings & Films

Effects of duty cycle and nitrogen flow rate on the mechanical properties of (V,Mo)N coatings deposited by high-power pulsed magnetron sputtering

Yiqun Feng, Tsai-Fu Chung, Chien-Nan Hsiao, Jia-Hong Huang

Summary: This study investigated the effects of duty cycle and nitrogen flow rate on the microstructure and mechanical properties of (V,Mo)N coatings deposited by high-power pulsed magnetron sputtering (HPPMS). The results showed that the N/metal ratio and lattice parameter were affected by the nitrogen flow rate, while the deposition time influenced the preferred orientation of the coatings. Moreover, the (V,Mo)N coatings deposited by HPPMS exhibited higher hardness and fracture toughness compared to those deposited by dc-unbalanced magnetron sputtering (dc-UBMS).

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A (2023)

暂无数据