Residual stress evolution during long-term and cyclic aging and annealing of gold films deposited by electron beam evaporation

标题
Residual stress evolution during long-term and cyclic aging and annealing of gold films deposited by electron beam evaporation
作者
关键词
Gold films, Residual stress, Evolution, Annealing, Aging
出版物
VACUUM
Volume 120, Issue -, Pages 132-138
出版商
Elsevier BV
发表日期
2015-07-07
DOI
10.1016/j.vacuum.2015.07.002

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