Although magnetic shape memory alloys have attracted large scientific interest, miniaturization as single-crystalline thin films is still a greatly unresolved issue. In the present work we investigate the microstructure of epitaxial NiMnGa thin films which are fabricated by sputter deposition on magnesium oxide substrates at elevated temperatures. Transmission and scanning electron microscopy as well as atomic force microscopy studies are employed to relate surface topography to twin formation in 7 M martensitic NiMnGa films. Additional findings include pore formation in substrate proximity as well as minor precipitation with reduced nickel and gallium contents.
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