Effective surface passivation of crystalline silicon using ultrathin Al2O3films and Al2O3/SiNxstacks

标题
Effective surface passivation of crystalline silicon using ultrathin Al2O3films and Al2O3/SiNxstacks
作者
关键词
-
出版物
Physica Status Solidi-Rapid Research Letters
Volume -, Issue -, Pages 287-289
出版商
Wiley
发表日期
2009-09-17
DOI
10.1002/pssr.200903272

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