Zinc oxide grown by atomic layer deposition - a material for novel 3D electronics

标题
Zinc oxide grown by atomic layer deposition - a material for novel 3D electronics
作者
关键词
-
出版物
PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS
Volume 247, Issue 7, Pages 1611-1615
出版商
Wiley
发表日期
2010-05-05
DOI
10.1002/pssb.200983699

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