Second harmonic generation spectroscopy on Si surfaces and interfaces

Optical second harmonic generation (SHG) spectroscopy studies of Si(111) surfaces and interfaces are reviewed for two types of systems: (1) clean 7 x 7 and root 3 x root 3-Ag reconstructed surfaces prepared under ultra-high vacuum conditions where surface states are excited and (2) interfaces in silicon-on-insulator (SOI) structures and thin metal films on Si surfaces where several interfaces contribute to the SHG. In all the systems resonances are seen at interband transitions near the bulk critical points E-1 and E-2. On the clean surfaces a number of resonances appear below the onset of bulk-like interband transitions that can be referred to excitations of dangling bond surface states. Adsorption of oxygen leads to formation of a new surface resonance. Such resonances appearing in the region between the bulk critical points E-1 and E-2 are also shown to be important for Si/oxide interfaces in SOI structures. Finally, examples of spectroscopy on layers buried below thin Ag and Au films are given. (C) 2010 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim