Effects of high-temperature treatment on the hydrogen distribution in silicon oxynitride/silicon nitride stacks for crystalline silicon surface passivation

Electrical, optical and structural investigation of plasma-enhanced chemical-vapor-deposited amorphous silicon oxynitride films for solar cell applications

(2012) Nils Brinkmann et al.   SOLAR ENERGY MATERIALS AND SOLAR CELLS

Surface passivation of crystalline silicon by plasma-enhanced chemical vapor deposition double layers of silicon-rich silicon oxynitride and silicon nitride

(2011) Johannes Seiffe et al.   JOURNAL OF APPLIED PHYSICS

Effect of PECVD silicon oxynitride film composition on the surface passivation of silicon wafers

(2011) Brett Hallam et al.   SOLAR ENERGY MATERIALS AND SOLAR CELLS

Firing stability of SiNy/SiNx stacks for the surface passivation of crystalline silicon solar cells

(2011) S. Gatz et al.   SOLAR ENERGY MATERIALS AND SOLAR CELLS

High Quality Aluminum Oxide Passivation Layer for Crystalline Silicon Solar Cells Deposited by Parallel-Plate Plasma-Enhanced Chemical Vapor Deposition

(2009) Shinsuke Miyajima et al.   Applied Physics Express

Very low surface recombination velocity on p-type c-Si by high-rate plasma-deposited aluminum oxide

(2009) Pierre Saint-Cast et al.   APPLIED PHYSICS LETTERS

IR characterization of hydrogen in crystalline silicon solar cells

(2009) M. Stavola et al.   PHYSICA B-CONDENSED MATTER

Thermal stability of amorphous silicon/silicon nitride stacks for passivating crystalline silicon solar cells

(2008) S. Gatz et al.   APPLIED PHYSICS LETTERS

Impact of PECVD SiON stoichiometry and post-annealing on the silicon surface passivation

(2007) J. Dupuis et al.   THIN SOLID FILMS