期刊
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE
卷 209, 期 7, 页码 1279-1286出版社
WILEY-V C H VERLAG GMBH
DOI: 10.1002/pssa.201127627
关键词
copper oxide thin films; optical properties; RF magnetron sputtering; XPS
Copper oxide films were deposited on glass and silicon substrates held at 473?K by radio-frequency (RF) magnetron sputtering of copper target under different oxygen partial pressure in the range 5 x 10(-38) x 10(-2)?Pa. The influence of oxygen partial pressure on the compositional, chemical binding configuration, structural, morphological, electrical, and optical properties of the deposited films was investigated. The films grown at low oxygen partial pressures?
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