Preparation and characterization of sprayed In2O3:Mo films

Transparent conducting oxides (TCO) play a major role in the area of thin film photovoltaics, flat panel displays, organic light emitting diodes and other optoelectronic devices. In order to improve the performance of a device, the TCO should have good optical transmittance as well as conductivity. In the present study, In2O3:Mo films have been grown by an economic and simple spray pyrolysis method with different molybdenum doping concentrations that vary in the range, 0-12 at% at a substrate temperature of 400 degrees C. The structural and morphological, electrical and optical behavior of the as-grown layers were studied. All the deposited layers showed a body-centered cubic structure with a strong (222) orientation. In2O3:Mo films grown with Mo-concentration of 6.0 at% had the maximum grain size of 90 nm. The average optical transmittance of the films was > 85% in the visible region. The change of grain size, electrical resistivity, carrier mobility and density, optical band gap and figure of merit with doping concentration was reported and discussed. (c) 2008 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.