Preparation of 3 inch freestanding GaN substrates by hydride vapor phase epitaxy with void-assisted separation

标题
Preparation of 3 inch freestanding GaN substrates by hydride vapor phase epitaxy with void-assisted separation
作者
关键词
-
出版物
出版商
Wiley
发表日期
2008-04-18
DOI
10.1002/pssa.200778431

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