Review
Nanoscience & Nanotechnology
Xavier X. Chia, Dawn T. H. Tan
Summary: Silicon nitride (SiN) has become a popular choice for photonic-integrated circuits (PICs) due to its broadband transparency, compatibility with CMOS fabrication processes, and high optical bandgap. However, current fabrication methods result in trade-offs between low thermal budgets and low losses. Recent research has focused on using deuterated silicon nitride (SiNx:D) to achieve low-loss PICs through a low-temperature, CMOS-compatible process. These devices show promise for both linear and nonlinear applications and have the potential to enable highly efficient chips with co-packaged electronics and photonics devices.
Article
Optics
Jian Shen, Yuyan Fan, Zihan Xu, Liying Wu, Ying Wang, Xiuyan Li, Xuetao Gan, Yong Zhang, Yikai Su
Summary: This study proposes a new silicon photonics platform for ultralow-power tuning using piezo-optomechanical coupling with hafnium-oxide actuators. A tunable silicon-hafnium-oxide hybrid microring is demonstrated to showcase the potential of this platform. The hybrid microring allows for linear bidirectional tuning with a wavelength tuning efficiency of 8.4 pm V-1 and a power efficiency of 0.12 nW pm(-1). The technology of hybrid silicon-hafnium-oxide with CMOS compatibility advances the field of ultralow-power integrated photonic devices and has applications in optical communications, computing, and cryogenic environments.
LASER & PHOTONICS REVIEWS
(2023)
Article
Engineering, Electrical & Electronic
Abubaker M. Tareki, Connor Kupchak, Khaled Mnaymneh
Summary: This paper presents an optimization procedure for depositing low-loss silicon nitride films at temperatures of 760 degrees C and 820 degrees C using low-pressure chemical vapor deposition. The films were characterized in terms of quality and compositional proximity to stoichiometric silicon nitride. It was found that the film deposited at 760 degrees C showed higher stoichiometry and lower optical losses compared to the film deposited at 820 degrees C. The impact of film stress on the refractive index was also investigated.
IEEE PHOTONICS JOURNAL
(2023)
Article
Engineering, Electrical & Electronic
Ali Azam, Zhidong Bai, Jeffrey S. Walling
Summary: This paper presents an ultra-low power, integrated pulse width modulated (PWM) temperature sensor, which generates temperature output by comparing temperature-dependent voltage with temperature-independent voltage. The sensor utilizes a feedback-corrected 2-transistor voltage reference cell to provide steady output across temperature, enabling operation with low supply voltages and minimal power consumption. The sensor allows for robust temperature measurement by utilizing a ratio of output pulse-widths.
IEEE SENSORS JOURNAL
(2021)
Article
Materials Science, Ceramics
T. V. Perevalov, V. A. Volodin, G. N. Kamaev, A. A. Gismatulin, S. G. Cherkova, I. P. Prosvirin, K. N. Astankova, V. A. Gritsenko
Summary: The electronic structure and optical properties of SiOxNy:H films enriched with silicon obtained by plasma-enhanced chemical deposition are studied. It is found that the film composition can be effectively varied by changing the gas flow ratio and plasma generator power. Additionally, the p+-Si/SiOxNy:H/Ni structures exhibit properties of memristor bipolar type.
JOURNAL OF NON-CRYSTALLINE SOLIDS
(2022)
Article
Physics, Applied
Caroline Schwinge, Kati Kuehnel, Jennifer Emara, Lisa Roy, Kati Biedermann, Wenke Weinreich, Sabine Kolodinski, Maciej Wiatr, Gerald Gerlach, Maik Wagner-Reetz
Summary: The power factor of CMOS-compatible SiGe films was investigated, and a high power factor was achieved by controlling the doping concentration. The results demonstrate the potential of SiGe as a promising material for the production of thermoelectric embedded applications.
APPLIED PHYSICS LETTERS
(2022)
Article
Engineering, Electrical & Electronic
Marco Eppenberger, Mattia Bonomi, David Moor, Marco Mueller, Bertold Ian Bitachon, Thomas Burger, Luca Alloatti
Summary: As optical communication technology advances, integrated optical microring resonators are playing a crucial role in computer communications, enabling more efficient data transmission and achieving small, high-speed optical links.
JOURNAL OF LIGHTWAVE TECHNOLOGY
(2021)
Article
Engineering, Electrical & Electronic
Yuning Zhang, Jiayang Wu, Yang Qu, Linnan Jia, Baohua Jia, David J. Moss
Summary: Theoretical study on the Kerr nonlinear optical performance of silicon nanowire waveguides integrated with 2D layered graphene oxide films reveals significant enhancement of Kerr nonlinearity. Optimization of waveguide geometry and GO film thickness can increase the effective nonlinear parameter and FOM. By evaluating the spectral broadening induced by self-phase modulation, the trade-off between enhancing Kerr nonlinearity and minimizing loss is examined.
JOURNAL OF LIGHTWAVE TECHNOLOGY
(2021)
Article
Chemistry, Physical
Jiahui Xu, Shizheng Li, Wenjing Zhang, Shang Yan, Cui Liu, Xiao Yuan, Xiaojun Ye, Hongbo Li
Summary: This study investigates the effects of deposition and annealing temperature on the growth and surface passivation of ALD-SiO2 films. Higher deposition temperature improves growth rate and refractive index, while high-temperature annealing enhances surface passivation.
APPLIED SURFACE SCIENCE
(2021)
Article
Materials Science, Multidisciplinary
L'ubos Podlucky, Andrej Vincze, Sona Kovacova, Juraj Chlpik, Jaroslav Kovac, Frantisek Uherek
Summary: This paper presents the analysis of SiON films deposited on silicon wafers for optical waveguides using the PECVD process, focusing on the impact of N2O flow rate. Various film properties were studied using different instruments, showing that increasing N2O flow rate led to a decrease in refractive index and an increase in deposition rate. By adjusting the gas flow rate during PECVD, the oxygen and nitrogen ratio in the SiON film could be controlled to tailor its optical properties for waveguide applications.
Article
Engineering, Environmental
Konstantina Christina Topka, Hugues Vergnes, Tryfon Tsiros, Paris Papavasileiou, Laura Decosterd, Babacar Diallo, Francois Senocq, Diane Samelor, Nadia Pellerin, Constantin Vahlas, Brigitte Caussat, Marie-Joelle Menu
Summary: An apparent kinetic model is developed to predict the deposition rates and composition of silicon oxynitride films in a novel CVD process. The model combines gas and solid-phase analysis and successfully predicts the deposition rates and composition of SiOxNy films containing non-negligible carbon. This model represents the main chemical mechanisms involved in the CVD of a four-component material.
CHEMICAL ENGINEERING JOURNAL
(2022)
Article
Engineering, Electrical & Electronic
Kunihiro Kamataki, Yusuke Sasaki, Iori Nagao, Daisuke Yamashita, Takamasa Okumura, Naoto Yamashita, Naho Itagaki, Kazunori Koga, Masaharu Shiratani
Summary: High-quality amorphous silicon nitride (SiNx) thin films were fabricated by controlled growth of nanoparticles in SiH4+N2 multi-hollow remote plasma chemical vapor deposition (CVD) at low substrate temperature. The incorporation of nanoparticles in the film corresponded to a higher N/Si ratio, indicating nitridation of the nanoparticles in the plasma. The size of the nanoparticles was controlled by adjusting the N2/SiH4 gas flow ratio and total gas flow rate, resulting in higher N/Si ratio and lower hydrogen content in the film.
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
(2023)
Article
Nanoscience & Nanotechnology
Ju Won Choi, Byoung-Uk Sohn, Ezgi Sahin, George F. R. Chen, Peng Xing, Doris K. T. Ng, Benjamin J. J. Eggleton, Dawn T. H. Tan
Summary: This manuscript investigates nonlinear pulse propagation in a chip-based nonlinear Bragg grating and observes clear signatures of gap soliton propagation, including slow light, intensity-dependent transmission, intensity-dependent temporal delay, and gap soliton compression.
Article
Materials Science, Coatings & Films
Antony Premkumar Peter, Takayama Tomomi, Ebisudani Taishi, Shiba Eiichiro, Alfonso Sepulveda, Timothee Blanquart, Yosuke Kimura, Sujith Subramanian, Sylvain Baudot, Briggs Basoene, Anshul Gupta, Anabela Veloso, Elena Capogreco, Hans Mertens, Johan Meersschaut, Thierry Conard, Praveen Dara, Jef Geypen, Gerardo Martinez, Dmitry Batuk, Steven Demuynck, Pierre Morin
Summary: The study investigated the properties and functionalities of PEALD SiNx films synthesized under different deposition temperatures and plasma conditions, showing that higher temperatures and plasma conditions led to better performance. The outstanding conformality and high-end material properties of PEALD SiNx in ultrathin regimes highlight its potential for use in scaled down and advanced nanoelectronics device manufacturing.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
(2021)
Article
Chemistry, Multidisciplinary
Meng-Hsi Chuang, Kuan-Chang Chiu, Yu-Ting Lin, George Tulevski, Po-Han Chen, Atiye Pezeshki, Chung-Jen Chen, Po-Yen Chen, Lih-Juann Chen, Shu-Jen Han, Yi-Hsien Lee
Summary: This study demonstrates the realization of low static power hetero-CMOS inverters by integrating n-type monolayer MoS2 and p-type SWCNT networks. The balanced inverter exhibits a large peak gain of approximately 67 at a supply voltage of 2 V, with ultralow standby power consumption of approximately 5 pW and a practical peak gain of approximately 7 at a reduced supply voltage of 0.25 V. The high noise margin (>70%) validates the circuit's tolerance to external noises, and the dynamic analysis of the inverting amplifier shows a large AC gain. This work paves the way for wafer-scale integration of low-dimensional materials for low-power nanoelectronics.
ADVANCED FUNCTIONAL MATERIALS
(2023)
Article
Materials Science, Coatings & Films
Jurriaan Schmitz
SURFACE & COATINGS TECHNOLOGY
(2018)
Article
Materials Science, Multidisciplinary
Mengdi Yang, Antonius A. I. Aarnink, Jurriaan Schmitz, Alexey Y. Kovalgin
Article
Engineering, Electrical & Electronic
Vidhu Puliyankot, Giulia Piccolo, Raymond J. E. Hueting, Jurriaan Schmitz
IEEE TRANSACTIONS ON ELECTRON DEVICES
(2018)
Article
Physics, Applied
Gaurav Gupta, Sourish Banerjee, Satadal Dutta, Antonius A. I. Aarnink, Jurriaan Schmitz, Alexey Y. Kovalgin, Raymond J. E. Hueting
JOURNAL OF APPLIED PHYSICS
(2018)
Article
Engineering, Electrical & Electronic
Maurits J. de Jong, Cora Salm, Jurriaan Schmitz
MICROELECTRONICS RELIABILITY
(2018)
Article
Materials Science, Multidisciplinary
Arnoud J. Onnink, Jurriaan Schmit, Alexey Y. Kovalgin
Article
Engineering, Electrical & Electronic
Maurits J. de Jong, Cora Salm, Jurriaan Schmitz
MICROELECTRONICS RELIABILITY
(2019)
Article
Engineering, Electrical & Electronic
Milou van Rijnbach, Raymond J. E. Hueting, Maciej Stodolny, Gaby Janssen, Jimmy Melskens, Jurriaan Schmitz
IEEE TRANSACTIONS ON ELECTRON DEVICES
(2020)
Article
Engineering, Manufacturing
Kees van der Zouw, Antonius A. I. Aarnink, Jurriaan Schmitz, Alexey Y. Kovalgin
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
(2020)
Article
Engineering, Electrical & Electronic
Matthias L. Vermeer, Raymond J. E. Hueting, Luca Pirro, Jan Hoentschel, Jurriaan Schmitz
Summary: Quantification of interface traps in double-gate fully depleted silicon-on-insulator transistors is crucial for accurate device modeling and technology development. A new method combining the g(m)/I-D method and a revised form of the k-sweep method was developed in this study, resulting in a typical trap density of 2*10^(11)cm^(-2)eV^(-1). However, the allocation of traps to the front or back interface is challenging, with at least a 20% error reported.
IEEE TRANSACTIONS ON ELECTRON DEVICES
(2021)
Review
Green & Sustainable Science & Technology
Pelin Yilmaz, Jurriaan Schmitz, Mirjam Theelen
Summary: This review paper provides an overview of studies on Potential Induced Degradation (PID) in copper indium gallium diselenide (CIGS) photovoltaics, including observations, proposed origins, testing methods, and preventive measures. Studies on cells, minimodules, and modules are presented and compared.
RENEWABLE & SUSTAINABLE ENERGY REVIEWS
(2022)
Review
Green & Sustainable Science & Technology
M. Aghaei, A. Fairbrother, A. Gok, S. Ahmad, S. Kazim, K. Lobato, G. Oreski, A. Reinders, J. Schmitz, M. Theelen, P. Yilmaz, J. Kettle
Summary: This article reviews the latest knowledge on the reliability of PV modules, including reliability metrics, stress factors, degradation, and failure modes. By analyzing the degradation and failure phenomena, strategies can be developed to improve the operational lifetime of PV systems and reduce the cost of electricity.
RENEWABLE & SUSTAINABLE ENERGY REVIEWS
(2022)
Review
Energy & Fuels
Bas van Wijngaarden, Junchun Yang, Jurriaan Schmitz
Summary: This paper reviews literature published from 2017 to 2021 on the Cox-Strack method for contact resistivity determination in photovoltaic cell engineering. It analyzes possible inaccuracies in the method and suggests that more than half of the reviewed articles may require additional analysis for accurate quantification of lower contact resistance values. The paper concludes with recommendations for improving the Cox-Strack methodology.
SOLAR ENERGY MATERIALS AND SOLAR CELLS
(2022)
Proceedings Paper
Engineering, Electrical & Electronic
Emre Ozturk, Mike J. Dikkers, Kevin M. Batenburg, Cora Salm, Jurriaan Schmitz
2019 IEEE INTERNATIONAL INTEGRATED RELIABILITY WORKSHOP (IIRW)
(2019)
Proceedings Paper
Engineering, Electrical & Electronic
Kees van der Zouw, Antonius A. I. Aarnink, Jurriaan Schmitz, Alexey Y. Kovalgin
2019 IEEE 32ND INTERNATIONAL CONFERENCE ON MICROELECTRONIC TEST STRUCTURES (ICMTS)
(2019)