Infrared dielectric properties of low-stress silicon nitride

标题
Infrared dielectric properties of low-stress silicon nitride
作者
关键词
-
出版物
OPTICS LETTERS
Volume 37, Issue 20, Pages 4200
出版商
The Optical Society
发表日期
2012-10-04
DOI
10.1364/ol.37.004200

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