期刊
OPTICS LETTERS
卷 35, 期 8, 页码 1169-1171出版社
OPTICAL SOC AMER
DOI: 10.1364/OL.35.001169
关键词
-
类别
资金
- National Natural Science Foundation of China (NSFC) [60978044]
- National High Technology Research and Development Program of China [2009AA04Z304]
To improve the replicating quality in producing micro-optical elements with continuous relief, the resist layer on substrate is shaped against the negative stamp by dry etching to enable it to have the same geometry as the pattern area of the negative stamp. The negative stamp is then aligned with and imprinted into the shaped resist. The produced continuous relief is transferred into the substrate by dry etching as well. Experiment results indicate that this method has both the long service life of a negative stamp and easy filling of a positive stamp. (C) 2010 Optical Society of America
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据