期刊
OPTICS EXPRESS
卷 22, 期 14, 页码 16767-16777出版社
OPTICAL SOC AMER
DOI: 10.1364/OE.22.016767
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资金
- Air Force Office of Scientific Research [FA9550-13-1-0032]
We have designed interlayer grating couplers with single/double metallic reflectors for Si/SiO2/SiN multilayer material platform. Out-of-plane diffractive grating couplers separated by 1.6 m thick buffer SiO2 layer are vertically stacked against each other in Si and SiN layers. Geometrical optimization using genetic algorithm coupled with electromagnetic simulations using two-dimensional (2D) finite element method (FEM) results in coupler designs with high peak coupling efficiency of up to 89% for double-mirror and 64% for single-mirror structures at telecom wavelength. Also, 3-dB bandwidths of 40 nm and 50 nm are theoretically predicted for the two designs, respectively. We have fabricated the grating coupler structure with single mirror. Measured values for insertion loss and 3-dB bandwidth in the fabricated single-mirror coupler confirms the theoretical results. This opens up the possibility of low-loss 3D dense integration of optical functionalities in hybrid material platforms. (C) 2014 Optical Society of America
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