Silicon nitride CMOS-compatible platform for integrated photonics applications at visible wavelengths

标题
Silicon nitride CMOS-compatible platform for integrated photonics applications at visible wavelengths
作者
关键词
-
出版物
OPTICS EXPRESS
Volume 21, Issue 12, Pages 14036
出版商
The Optical Society
发表日期
2013-06-05
DOI
10.1364/oe.21.014036

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