4.6 Article

Parallel laser micromachining based on diffractive optical elements with dispersion compensated femtosecond pulses

期刊

OPTICS EXPRESS
卷 21, 期 26, 页码 31830-31836

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OPTICAL SOC AMER
DOI: 10.1364/OE.21.031830

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  1. Spanish Ministerio de Ciencia e Innovacion through Consolider Programme (SAUUL) [CSD2007-00013, FIS2010-15746]
  2. Generalitat Valenciana
  3. Universitat Jaume I [PROMETEO/2012/021, P11B2010-26]

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We experimentally demonstrate multi-beam high spatial resolution laser micromachining with femtosecond pulses. The effects of chromatic aberrations as well as pulse stretching on the material processed due to diffraction were significantly mitigated by using a suited dispersion compensated module (DCM). This permits to increase the area of processing in a factor 3 in comparison with a conventional setup. Specifically, 52 blind holes have been drilled simultaneously onto a stainless steel sample with a 30 fs laser pulse in a parallel processing configuration. (C) 2013 Optical Society of America

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