期刊
OPTICS EXPRESS
卷 20, 期 18, 页码 20659-20665出版社
OPTICAL SOC AMER
DOI: 10.1364/OE.20.020659
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资金
- Air Force Office of Scientific Research (AFOSR) STTR [FA9550-11-C-0058, FA9550-11-C-0014]
- Multi-disciplinary University Research Initiative (MURI) program through the AFOSR [FA 9550-08-1-0394]
We report a subwavelength grating (SWG) coupler for coupling light efficiently into in-plane semiconductor nanomembrane photonic devices for the first time. The SWG coupler consists of a periodic array of rectangular trenches fabricated on a silicon nanomembrane (SiNM) transferred onto a glass substrate. At a wavelength of 1555.56 nm, the coupling efficiency of the fabricated 10 mu m wide, 17.1 mu m long SWG is 39.17% (-4.07 dB), with 1 dB and 3 dB bandwidths of 29 nm and 57 nm, respectively. Peak efficiency varies by 0.26 dB when measuring 5 fabricated grating pairs. Coupling efficiency can further be improved with an improved SiNM transfer process. Such high efficiency couplers allow for the successful realization of a plethora of hybrid photonic devices utilizing nanomembrane technology. (C) 2012 Optical Society of America
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