Ultra-high quality factor planar Si_3N_4 ring resonators on Si substrates

标题
Ultra-high quality factor planar Si_3N_4 ring resonators on Si substrates
作者
关键词
-
出版物
OPTICS EXPRESS
Volume 19, Issue 14, Pages 13551
出版商
The Optical Society
发表日期
2011-06-30
DOI
10.1364/oe.19.013551

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