☆ 4.6 Article

Low loss shallow-ridge silicon waveguides

OPTICS EXPRESS (2010)

期刊

OPTICS EXPRESS

卷 18, 期 14, 页码 14474-14479

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OPTICAL SOC AMER

DOI: 10.1364/OE.18.014474

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Optics

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DARPA MTO office [HR0011-08-9-0001]

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Reagent

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We demonstrate low loss shallow-ridge silicon waveguides with an average propagation loss of 0.274 +/- 0.008 dB/cm in the C-band (1530 nm - 1565 nm). These waveguides have a cross section of 0.25 mu m by 2 mu m and are fabricated by standard photolithography and dry etching. We also investigate a compact double-level taper which adiabatically couples light from these waveguides to silicon strip waveguides enabling tight bends. (C) 2010 Optical Society of America

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